QK-CZ90 Single Crystal Silicon Furnace (Semi-Automatic)
1.Core system controller
The system adopts PLC industrial color Touch Panel, therefore, it
has the simple structurethe characteristic of this system is saving
power, less radiation, high reliability, less possibility for
system crash. Meanwhile, the PLC and the touch panel working
independtly, only using one cable to connect the system.
2.control system
The system can semi-automatically pull the monocrystalline
according to the controller’s instruction, it is easy to control.
Also the controller can modify the instruction using the touch
panel anytime. The automatic system can working step by step, it
can also working continuously. Adding the power control system on
the closed-loop power, and signal fault diagnostic function can
eliminate the pollution of the observation window, signal
interference, heating-power failure, heater’s short-circuit, heater
resistance mutations, and manually input errors,etc.
3.Workstation Monitoring System
The system also has workstations configured monitoring system, the
system with one PC machine can simultaneously monitor 8
monocrystalline furnaces, using RS 422 high-speed communication
system, photoelectric isolation, highly reliable.
4.Electrical hardware Setting
The layout of the electrical cabinet of this system using modular
centralized management. Each modular using simple connection, and
single modular can be repaired with independently charged. Motor
protection using the combination of the air switches and fuse, ease
of operation and maintenance. Meanwhile, the main electrical point
can be easy to identify on the terminal board. The machine
container’s layout is quite reasonable and brief. Also, the system
has a two-color lights sound and light alarm system.
Crystal Seed Growth and Rotation Parts: First, the system keeps
stable when crystal seed axis rotating in a high speed. Crystal
seed rotating and pulling airproof both use high quality magnetic
fluid components, which have no leakage, and a long time usage;
Second, in order to keep system running well, the precise spline
axis and driving DC servo motor are all imported parts. Last but
not the least, pulling head has to go through strict static-balance
and dynamic-balance test, and shaking range of crystal seed under
high speed rotation must be less than 2mm, which could suit the
requirement of the semiconductors process.
Crucible Movement and Rotation Parts: It uses huge cast iron
upright post、dual scroll linear navigation、precision ball screw and
imported precise reducer to ensure crucible system running
perfectly under overweight and ultra low speed condition.
Floating flap valve locate in between main chamber and pulling
chamber, which can still maintain thermal field temperature in
certain degree, remove the crystal, the replacement of crystal seed
and supplementary feeding for continuous crystal pulling.
Hydraulic transmission devices can accurately complete the opening
of main chamber and pulling chamber, when main chamber and pulling
chamber lift to certain position, then symmetric spin out of place.
In order to keep host stable and reliable, and easy to take out
crystal, cleaning thermal field and inside of furnace is necessary.
The furnace body uses 316L stainless steel and the whole flange
forging, through vibration to eliminate the stress, the flaw
inspection, the fault detection and helium mass spectrum leak
detector.
Power supply:380VAC±5%
Power frequency:50HZ
Power phase:Three-phase
Transformer capacity:190KVA
Heater power(maximum):160KW
The highest temperature:1600℃
Heater volt(maximum):60V
Vacuum in cold condition:＜3Pa
Crystal diameter:￠6～￠8
Charge size:90Kg
Main chamber size:900×1250mm
Top chamber size:900×900mm
Bottom chamber size:900×350mm
Isolation valve I. D:280mm
Chamber height:410mm
Pulling chamber size:280×2500
Seed rotation:1～40rpm
Seed lift rate:0.2～8mm/min
Seed jog speed:≥350mm/min
Total seed travel in chamber:3500mm
Total seed travel in chamber:2100mm
Crucible lift rate:0.02～1mm/min
Crucible jog speed:≥100mm/min
Total crucible travel:400mm
Crucible Rotation:1～30rpm
The distance between the two electrode center:480mm
Water rate:25m3/h
Machine occupy area:2500x2000mm
Machine height:6800mm
Machine weight:7500Kg
